Read e-book online Optical Inspection of Microsystems PDF

By Karl Dieter Moeller

ISBN-10: 0387953604

ISBN-13: 9780387953601

The place traditional trying out and inspection options fail on the micro-scale, optical suggestions supply a quick, strong, and comparatively reasonably cheap substitute for investigating the houses and caliber of microsystems. pace, reliability, and price are serious elements within the endured scale-up of microsystems expertise throughout many industries, and optical innovations are in a distinct place to meet glossy advertisement and business calls for.

Optical Inspection of Microsystems is the 1st complete, up to date survey of crucial and favourite full-field optical metrology and inspection applied sciences. below the tips of complete researcher Wolfgang Osten, specialist members from business and educational associations all over the world percentage their services and adventure with suggestions similar to snapshot correlation, gentle scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré thoughts, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. in addition they learn sleek techniques to info acquisition and processing. The e-book emphasizes the assessment of assorted houses to extend reliability and advertise a constant method of optical trying out. quite a few sensible examples and illustrations strengthen the recommendations.

Supplying complex instruments for microsystem production and characterization, Optical Inspection of Microsystems lets you achieve towards the next point of caliber and reliability in sleek micro-scale purposes.

Show description

Read or Download Optical Inspection of Microsystems PDF

Similar microelectronics books

Download e-book for iPad: VLIW Microprocessor Hardware Design: On ASIC and FPGA by Lee Weng Fook

Gather the layout info, equipment, and abilities had to grasp the recent VLIW structure! VLIW Microprocessor layout provides you with an entire advisor to VLIW design—providing cutting-edge assurance of microarchitectures, RTL coding, ASIC circulate, and FPGA movement of layout.

Download e-book for iPad: Future trends in microelectronics. journey into the unknown by Serge Luryi, Jimmy Xu, Alexander Zaslavsky

The ebook provides the long run advancements and strategies within the constructing box of microelectronics. The book’s chapters comprise contributions from quite a few authors, all of whom are best execs affiliated both with best universities, significant semiconductor businesses, or executive laboratories, discussing the evolution in their career.

Extra info for Optical Inspection of Microsystems

Example text

The length of the convex hull. The area covered by an object including or excluding the area of any holes contained within. The quotient of contour length and area. The quotient of contour length and convex hull length; this is a measure of the jaggedness of an edge. The center of gravity of an object. The x value of the pixels lying furthest away from the perimeter of an object either to the right or left, or the y value of the pixels lying furthest away from the perimeter of an object either to the top or bottom.

Combined in this way, small particles are removed from images and object structures are separated more clearly from one another. 31 (a) Grayscale image, (b) filtered using erosion, (c) filtered using dilation. 32 (a) Grayscale image, (b) results of opening, (c) results from closing. Closing is achieved by first using a dilation filter and then an erosion filter on the resulting image. By combining the filters in this sequence, small holes in object structures are filled. 32. It is to be noted that both the morphological operators of opening and closing do not alter the size of object structures.

The same applies for complex test features. 5. Presentation of results: In the last process step, the calculated measurement values and test decisions are usually represented in numerical or graphical form. However, the presentation technique used — a domain of computer graphics — is not discussed here. 2 IMAGE DATA PREPROCESSING AND PROCESSING METHODS As mentioned earlier, before carrying out any feature extraction analysis, an image should be available in its best possible digital representation.

Download PDF sample

Optical Inspection of Microsystems by Karl Dieter Moeller


by John
4.1

Rated 4.12 of 5 – based on 38 votes