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It was emphasized that sensing and actuation cannot be viewed as the peripheral function in many applications. Integrated actuators/sensors with ICs compose the major class of MEMS. Due to the use of CMOS lithography-based technologies in fabrication actuators and sensors, MEMS leverage microelectronics (signal processing, computing, and control) in important additional areas that revolutionize the application capabilities. In fact, MEMS have been considerably leveraged the microelectronics industry beyond ICs.

X For rotational motion, the electromagnetic torque is Te (i ,θ ) = ∂Wc (i ,θ ) . ∂θ Micro- and meso-scale structures, as well as thin magnetic films, exhibit anisotropy. 8.

Furthermore, the geometry of nanostructures can be easily controlled by the number of CP and pairing MBB. It must be emphasized that it is possible to generate a quadrilateral self-assembled nanostructure by using four and more different CP. That is, in addition to electrostatic CP, chemical CP can be used. Single- and double-stranded structures can be generated and linked in the desired topological and architectural manners. The self-assembling must be controlled during the manufacturing cycle, and CP and MBB, which can be paired and topologically/architecturally bonded, must be added in the desired sequence.

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Nano- and Microelectromechanical Systems Fundamentals of Nano- and Microengineering by edited by Charles L. Wilson


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